Semiconductor structure including multiple gate electrodes and method for manufacturing the same
AssigneeNanya Technology Corporation
InventorJHEN-YU TSAI
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AssigneeNanya Technology Corporation
InventorJHEN-YU TSAI
Estimating the term…
The present disclosure provides a semiconductor structure. The semiconductor structure includes: a first doped structure over a substrate and a second doped structure over the first doped structure and the substrate; a first gate layer, at last partially disposed between the first doped structure and the second doped structure; a first gate dielectric layer, surrounding the first gate layer; a channel layer, surrounding the first gate dielectric layer; a second gate dielectric layer, surrounding the channel layer; and a second gate layer, surrounding the second gate dielectric layer. A manufacturing method for forming the same is also provided.
A method for manufacturing a semiconductor structure, comprising:
Dependencies are inferred from the claim text.