Antifuse devices and methods of making thereof

An antifuse device comprising:

• a first contact structure in a substrate, the first contact structure having a first contact side and a second contact side adjoining the first contact side, wherein the first contact side and the second contact side form a first contact corner having an acute angle;
• a second contact structure in the substrate, wherein the second contact structure is spaced from and not electrically connected to the first contact structure;
• a first dummy structure adjacent to the first contact structure and in the substrate, the first dummy structure having a first dummy side nearest to and spaced from the first contact side of the first contact structure by a first spacing;
• and
• a second dummy structure adjacent to the first contact structure and in the substrate, the second dummy structure having a second dummy side nearest to and spaced from the second contact side of the first contact structure by a second spacing, and wherein the first spacing is substantially the same as the second spacing.

A method of fabricating an antifuse device comprising:

• forming a first contact structure in a substrate, the first contact structure having a first contact side and a second contact side adjoining the first contact side, wherein the first contact side and the second contact side form a first contact corner having an acute angle;
• forming a second contact structure in the substrate, wherein the second contact structure is spaced from and not electrically connected to the first contact structure;
• and
• forming a first dummy structure adjacent to the first contact structure and in the substrate, the first dummy structure having a first dummy side nearest to and spaced from the first contact side of the first contact structure.