Integrated circuit devices with hybrid metal lines
AssigneeIntel Corporation
InventorsSukru Yemenicioglu, Leonard P. Guler, Nikhil Jasvant Mehta, Charles Henry Wallace
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AssigneeIntel Corporation
InventorsSukru Yemenicioglu, Leonard P. Guler, Nikhil Jasvant Mehta, Charles Henry Wallace
Estimating the term…
Methods for fabricating an integrated circuit (IC) device with one or more hybrid metal lines are provided. An example IC device includes a substrate; and a metal line extending, along an axis, over the substrate. The metal line has a first end and a second end along the axis. A portion of the metal line at the first end includes a first electrically conductive material. Another portion of the metal line includes a second electrically conductive material, where the second electrically conductive material is different from the first electrically conductive material. In some instances, the first electrically conductive material is a low-resistive, electrically conductive material, and the second electrically conductive material is a direct etch-compatible, electrically conductive material.
An integrated circuit (IC) device, comprising:
An integrated circuit (IC) device comprising:
A method of manufacturing an integrated circuit (IC) device, the method comprising:
Dependencies are inferred from the claim text.