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US 2024/0203793 A1Published application
Backside contact formation using pillar patterning
AssigneeSamsung Electronics Co., Ltd.
InventorsTae Sun Kim, Wonhyuk Hong, Jongjin Lee, Buhyun Ham, Kang-ill Seo
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Abstract
In order to achieve higher contact quality for backside power distribution networks, provided is a backside contact to a semiconductor device having a positive slope and a dielectric sidewall liner, and methods for making the same.
Claims15
A semiconductor unit comprising:
- A semiconductor device on a substrate, the semiconductor device having at least one terminal and at least 2 sides, the substrate being on a first side of the semiconductor device;
- A back-end-of-line (BEOL) region comprising a plurality of metal layers, and disposed on the opposite side of the semiconductor device from the substrate;
- A backside contact in the substrate and in contact with the terminal of the semiconductor device;
- Wherein the backside contact has a side contacting the terminal, a side contacting a backside power rail, and sidewalls extending from the terminal to the backside power rail;
- and
- Wherein the sidewalls of the backside contact have a positive slope and are lined with a dielectric liner.
3 more elements
A method for forming a semiconductor unit, comprising:
- Forming a semiconductor device on a substrate, the semiconductor device having at least one terminal and at least 2 sides, the substrate being on a first side of the semiconductor device;
- Forming a back-end-of-line (BEOL) region comprising a plurality of metal layers, disposed on the opposite side of the semiconductor device from the substrate;
- Forming a backside contact in the substrate and in contact with the terminal of the semiconductor device;
- Wherein the backside contact has a first side contacting the terminal, a second, opposite side contacting a backside power rail, and sidewalls extending from the terminal to the backside power rail;
- and
- Wherein the sidewalls of the backside contact have a positive slope and are lined with a dielectric liner.
3 more elements
Dependencies are inferred from the claim text.