Apparatus for transferring substrate

A substrate transfer apparatus comprising:

• a base;
• a left transfer arm configured to have a first arm link connected to the base and a first end effector on which a substrate is placed and which operates between a contract position and an expand position;
• a right transfer arm configured to have a second arm link connected to the base and a second end effector on which the substrate is placed and which operates between the contract position and the expand position;
• and
• a guide member for aligning the substrate when the left transfer arm or the right transfer arm backwardly moves from the expand position to the contact position.

A substrate transfer apparatus comprising:

• a base;
• a left transfer arm having a first arm link connected to the base, a first guide installed on the first arm link, and a first end effector connected to the first arm link, and configured to operate between a contract position and an expand position;
• and
• a right transfer arm having a second arm link connected to the base, a second guide installed on the second arm link, and second end effector connected to the second arm link, and configured to operate between the contract position and the expand position;
• and
• wherein the first end effector and the second end effector overlap each other when the left transfer arm and the right transfer arm are each in the contract position, and
• when the left transfer arm backwardly moves, the first guide moves to align the substrate placed on the first end effector, while the second guide does not move, and
• when the right transfer arm backwardly moves, the second guide moves to align the substrate placed on the second end effector, while the first guide does not move.