Back to results
US 2024/0203770 A1Published application
Rounded vertical wafer vessel rods
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChing-Wen CHENG, Xin-Kai HUANG, Kuei-Hsiung CHO
Life of this patent
Estimating the term…
Abstract
In an embodiment, a system includes: a base; and a rod set comprising multiple rods connected to the base, wherein each rod of the rod set comprises multiple fingers disposed in a vertically-stacked relationship to each other and separated respectively from each other by respective slots, wherein each slot is configured to receive a bevel of a wafer, and wherein each of the multiple fingers comprises a rounded end at a furthest extension.
Claims20
A system, comprising:
- a top base having an opening therein, wherein the top base includes a slot such that the top base is not completely enclosed;
- a bottom base;
- and
- at least one rod connected to the bottom base, wherein each rod of the at least one rod comprises multiple fingers.
1 more element
A wafer vessel comprising:
- a top base having an opening therein, wherein the top base includes a slot such that the top base is not completely enclosed;
- a bottom base;
- and
- at least one rod connected to the bottom base, wherein each rod of the at least one rod comprises:
- multiple fingers separated respectively from each other by respective slots, wherein each slot is configured to receive a wafer, wherein each rod comprises a rear rod portion that is farthest from the wafer, a middle rod portion adjacent the rear rod portion, an oblique rod portion adjacent to the middle rod portion, an oblique finger portion, and an end finger portion that comprises the multiple fingers.
2 more elements
A method, comprising:
- inserting a wafer into a wafer vessel, wherein the wafer vessel comprises:
- a top base having an opening therein, wherein the top base includes a slot such that the top base is not completely enclosed;
- a bottom base;
- and
- at least one rod connected to the bottom base, wherein each rod of the at least one rod comprises multiple fingers;
- inserting the wafer vessel into a thermal reaction chamber;
- and
- heating the wafer vessel within the thermal reaction chamber.
5 more elements
Dependencies are inferred from the claim text.