Vibration sensor assembly

A vibration sensor assembly configured to couple to a moveable member of a substrate transfer device, the vibration sensor assembly comprising:

• an accelerometer configured to detect vibration of the substrate transfer device;
• a processing device communicatively coupled to the accelerometer, wherein the processing device is to:
• receive vibration data from the accelerometer, wherein the vibration data is indicative of the vibration of the substrate transfer device;
• determine at least one vibration frequency peak of the vibration data, wherein the at least one vibration frequency peak corresponds to at least one critical frequency associated with the substrate transfer device;
• determine that the at least one vibration frequency peak exceeds a threshold magnitude;
• and
• responsive to determining that the at least one vibration frequency peak exceeds the threshold magnitude, cause a data signal indicative of the at least one vibration frequency peak to be transmitted to a controller of the substrate transfer device.

A method comprising:

• receiving vibration data from an accelerometer, wherein the vibration data is indicative of vibration of a substrate transfer device;
• determining at least one vibration frequency peak of the vibration data, wherein the at least one vibration frequency peak corresponds to at least one critical frequency associated with the substrate transfer device;
• determining that the at least one vibration frequency peak exceeds a threshold magnitude;
• and
• responsive to determining that the at least one vibration frequency peak exceeds the threshold magnitude, causing a digital signal indicative of the at least one vibration frequency peak to be transmitted to a controller of the substrate transfer device.