Control unit and semiconductor manufacturing equipment including the same

A control unit for controlling first and second units,

• wherein
• the first unit treats a substrate and is connected to a damper, which is installed in a main exhaust pipe through a first auxiliary exhaust pipe,
• the second unit treats the substrate and is connected to the damper, which is also connected to the main exhaust pipe through a second auxiliary exhaust pipe,
• the control unit receives pressure resulting from an exhaust volume of the first unit from a first sensor, which is installed in the first auxiliary exhaust pipe,
• the control unit receives pressure resulting from an exhaust volume of the second unit from a first sensor, which is installed in the second auxiliary exhaust pipe, and
• the control unit controls the damper based on the received pressures.

Semiconductor manufacturing equipment comprising:

• a damper installed in a main exhaust pipe;
• a first unit treating a substrate and connected to the main exhaust pipe through a first auxiliary exhaust pipe;
• a second unit treating the substrate and connected to the main exhaust pipe through a second auxiliary exhaust pipe;
• a first shutoff valve installed in the first auxiliary exhaust pipe;
• a second shutoff valve installed in the second auxiliary exhaust pipe;
• a first sensor installed in the first auxiliary exhaust pipe and disposed between the first unit and the first shutoff valve;
• a second sensor installed in the second auxiliary exhaust pipe and disposed between the second unit and the second shutoff valve;
• and
• a control unit controlling the first and second units,
• wherein
• the control unit controls the damper based on pressures resulting from exhaust volumes measured from the first and second units by the first and second sensors, respectively,
• the control unit selectively controls the damper based on whether the first and second shutoff valves are open or closed, and
• the control unit controls the damper if the first and second shutoff valves have the same status regarding whether they are open or closed, and does not control the damper if the first and second shutoff valves have different statuses regarding whether they are open or closed.