Film forming method and film forming apparatus
AssigneeTokyo Electron Limited
InventorManabu HONMA
Life of this patent
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Abstract
A film forming method includes executing a first cycle, which comprises adsorbing a raw material gas onto a substrate and reacting the raw material gas adsorbed onto the substrate with a reaction gas, a first number of times, supplying an adsorption inhibitor, which inhibits adsorption of the raw material gas on to the substrate, in a larger amount to a peripheral edge portion of the substrate than to a central portion, and executing a second cycle, which comprises the executing of the first cycle and the supplying of the adsorption inhibitor, a second number of times.
Claims11
A film forming method comprising:
- executing a first cycle, which comprises adsorbing a raw material gas onto a substrate and reacting the raw material gas adsorbed onto the substrate with a reaction gas, a first number of times;
- supplying an adsorption inhibitor, which inhibits adsorption of the raw material gas on to the substrate, in a larger amount to a peripheral edge portion of the substrate than to a central portion;
- and
- executing a second cycle, which comprises the executing of the first cycle and the supplying of the adsorption inhibitor, a second number of times.
A film forming apparatus comprising:
- a processing container;
- a gas supplier configured to supply a gas into the processing container;
- and
- a controller,
- wherein the controller is configured to perform:
- executing a first cycle, which comprises adsorbing a raw material gas onto a substrate and reacting the raw material gas adsorbed onto the substrate with a reaction gas, a first number of times;
- supplying an adsorption inhibitor, which inhibits adsorption of the raw material gas on to the substrate, in a larger amount to a peripheral edge portion of the substrate than to a central portion;
- and
- executing a second cycle, which comprises the executing of the first cycle and the supplying of the adsorption inhibitor, a second number of times.
Dependencies are inferred from the claim text.