Substrate processing apparatus

A substrate processing apparatus comprising:

• a process chamber comprising a processing space;
• a microwave application unit located in an upper portion of the processing space;
• and
• a heater located inside the process chamber and configured to heat a lower portion of the processing space,
• wherein the heater comprises a body extending in a horizontal direction;
• a plurality of first protrusions protruding in a vertical direction from an upper surface of the body;
• and
• a second protrusion protruding in the vertical direction from an edge portion of the upper surface of the body,
• wherein the second protrusion defines a central portion of the body and an outer portion of the body opposite to the central portion when viewed from the vertical direction, and
• the body has a recess formed in the upper surface of the body in the outer portion of the body.

A substrate processing apparatus comprising:

• a process chamber comprising a processing space for processing a substrate therein;
• a heater located inside the process chamber and configured to support and heat a lower surface of the substrate, wherein the heater comprises a body extending in a horizontal direction;
• a gas supply unit configured to supply a processing gas to the processing space;
• a microwave application unit configured to heat the processing gas supplied to the processing space;
• a plurality of first protrusions protruding in a vertical direction from an upper surface of the body;
• and
• a second protrusion protruding in the vertical direction from an edge portion of the upper surface of the body,
• wherein the second protrusion a central portion of the body and an outer portion of the body opposite to the central portion when viewed from the vertical direction,
• the second protrusion has a ring shape when viewed from the vertical direction,
• the body has a recess formed in the upper surface of the body in the outer portion of the body, and
• the recess has a ring shape when viewed from the vertical direction.