Optical inspection of a wafer
AssigneeTaiwan Samiconductor Manufacturing Co., Ltd.
InventorsChih-Lieh CHEN, Cheng-Kang HU, Cheng-Lung WU, Jiun-Rong PAI
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AssigneeTaiwan Samiconductor Manufacturing Co., Ltd.
InventorsChih-Lieh CHEN, Cheng-Kang HU, Cheng-Lung WU, Jiun-Rong PAI
Estimating the term…
An image analysis device may align an image to determine a position of a wafer within the image. The wafer may include a plurality of wafer bumps. The image analysis device may mask, based on the position of the wafer, the image to obtain an image of a portion of the wafer. The image analysis device may binarize the image of the portion of the wafer to create a binarized image of the portion of the wafer. The image analysis device may determine a bump pattern, associated with the plurality of wafer bumps, based on the binarized image of the portion of the wafer. The image analysis device may perform a defect analysis of the determined bump pattern. The defect analysis may be associated with detecting regions of the portion of the wafer in which one or more wafer bumps have abnormal bump heights.
A method, comprising:
An optical inspection system, comprising:
A method, comprising:
Dependencies are inferred from the claim text.