Method of detecting wafer defects based on singularly valuable decomposition

Abstract

A method of detecting wafer defects based on singularly valuable decomposition is provided in the present invention, including steps of input a wafer image, performing a preprocess to the wafer image through histogram equalization to obtain a preprocessed image, performing singularly valuable decomposition to the preprocessed image, performing defect magnification to the decomposed wafer image, reconstruct the magnified wafer image to obtain a defect saliency image, denoising the defect saliency image, and detecting defects in the denoised wafer image.

Dependencies are inferred from the claim text.