Method for designing vacuum system, method for selecting optimal pump capacity when designing vacuum system, and method for displaying design screen of vacuum system and apparatus therefor

A method for selecting a pump of an optimal capacity when designing a vacuum system, the method for selecting a pump of an optimal capacity in a vacuum system including a chamber, piping, and a pump, comprising:

• setting specifications and process conditions of a chamber, piping, and a pump of a first vacuum system disposed in a virtual region according to a user input;
• simulating the first vacuum system based on the specifications of the chamber, piping, and pump;
• displaying a first simulation result showing a change in chamber vacuum over time from a chamber start pressure when pumping the chamber and a second simulation result showing a change in chamber vacuum according to a change in gas load or flow, as results of the simulation;
• and
• selecting a pump capacity that satisfies the process conditions for each of the first simulation result and the second simulation result,
• wherein the process conditions comprise first process conditions related to the first simulation result and second process conditions related to the second simulation result.

A method for displaying a design screen of a vacuum system including a chamber, piping, and a pump, comprising:

• displaying a first vacuum system implemented in a virtual region on a screen according to a user input;
• simulating the first vacuum system, and displaying on the screen a first simulation result and a second simulation result, which are results of the corresponding simulation;
• displaying on the screen a second vacuum system implemented by reflecting piping or a pump having changed specifications in the first vacuum system according to a user input;
• and
• simulating the second vacuum system, and displaying on the screen a third simulation result and a fourth simulation result, which are results of the corresponding simulation,
• wherein specifications and process conditions of the chambers of the first vacuum system and the second vacuum system are identical, and process conditions are displayed, respectively, on the first simulation result, the second simulation result, the third simulation result, and the fourth simulation result.