Clock signal distribution system, integrated circuit device and method

An integrated circuit (IC) device, comprising:

• a substrate;
• a circuit region over the substrate, the circuit region comprising:
• at least one active region extending along a first axis, and
• at least one gate region extending across the at least one active region and along a second axis transverse to the first axis;
• and
• a clock distribution system over and electrically coupled to the circuit region, the clock distribution system configured to supply a clock signal to the circuit region, the clock distribution system comprising:
• in a first metal layer over the circuit region, a plurality of first metal patterns oblique to both the first axis and the second axis, and
• in a second metal layer over the circuit region, a plurality of second metal patterns transverse to the a plurality of first metal patterns and oblique to both the first axis and the second axis,
• wherein the plurality of first metal patterns in the first metal layer comprises at least one clock spine having a greater width than other first metal patterns among the plurality of first metal patterns.

A method, comprising:

• forming a circuit region over a substrate;
• and
• forming a plurality of metal patterns over the circuit region, and electrically coupling the plurality of metal patterns to form a clock mesh structure which is electrically coupled to the circuit region,
• wherein
• the clock mesh structure comprises a plurality of hexagonal regions arranged in a repeating manner and abutting each other, and
• each of the plurality of hexagonal regions comprises therein at least one octagon having sides each being a metal pattern among the plurality of metal patterns.