Air cooling apparatus, environmental control apparatus, lithography apparatus, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorSHINTARO AICHI
Life of this patent
Estimating the term…
Abstract
An air cooling apparatus for cooling air, includes a container, a boiling section arranged in the container, and a condensing section arranged in the container and above the boiling section. The boiling section includes a separator configured to separate a first path through which air of a cooling target moves and a second path through which a refrigerant moves. The separator includes a first heat exchanger configured to cause the air and the refrigerant to exchange heat. The refrigerant boiled in the second path by cooling the air is condensed in the condensing section.
Claims21
An air cooling apparatus for cooling air, comprising:
- a container;
- a boiling section arranged in the container;
- and
- a condensing section arranged in the container and above the boiling section,
- wherein the boiling section includes a separator configured to separate a first path through which air of a cooling target moves and a second path through which a refrigerant moves, the separator including a first heat exchanger configured to cause the air and the refrigerant to exchange heat, and
- the refrigerant boiled in the second path by cooling the air is condensed in the condensing section.
An environmental control apparatus comprising:
- an air cooling apparatus configured to cool air, and including a container, a boiling section arranged in the container, and a condensing section arranged in the container and above the boiling section, wherein the boiling section includes a separator configured to separate a first path through which air of a cooling target moves and a second path through which a refrigerant moves, the separator including a first heat exchanger configured to cause the air and the refrigerant to exchange heat, and wherein the refrigerant boiled in the second path by cooling the air is condensed in the condensing section;
- and
- an air heater configured to heat air cooled by the air cooling apparatus.
A lithography apparatus comprising:
- a chamber;
- a transfer device arranged in an internal space of the chamber and configured to transfer a pattern to a substrate;
- and
- an environmental control apparatus arranged to adjust a temperature of the internal space of the chamber,
- wherein the environmental control apparatus comprises:
- an air cooling apparatus configured to cool air, and including a container, a boiling section arranged in the container, and a condensing section arranged in the container and above the boiling section, wherein the boiling section includes a separator configured to separate a first path through which air of a cooling target moves and a second path through which a refrigerant moves, the separator including a first heat exchanger configured to cause the air and the refrigerant to exchange heat, and wherein the refrigerant boiled in the second path by cooling the air is condensed in the condensing section;
- and
- an air heater configured to heat air cooled by the air cooling apparatus.
Dependencies are inferred from the claim text.