Pattern formation method and replica template
AssigneeKioxia Corporation
InventorRyo KOBAYASHI
Life of this patent
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Abstract
A pattern formation method includes forming a hard mask layer on a first surface of a first substrate; exposing a second region of the first surface, with a first region of the first surface covered by the hard mask layer; forming a resist mask layer on the hard mask layer and on the second region; molding the resist mask layer by pressing a template against the resist mask layer; curing the resist mask layer; and forming a first recessed portion recessed below the first surface and a first protruding portion protruding beyond a bottom face of the first recessed portion.
Claims7
A pattern formation method, comprising:
- forming a hard mask layer on a first surface of a first substrate;
- exposing a second region of the first surface, with a first region of the first surface covered by the hard mask layer;
- forming a resist mask layer on the hard mask layer and on the second region;
- molding the resist mask layer by pressing a template against the resist mask layer;
- curing the resist mask layer;
- and
- forming a first recessed portion recessed below the first surface and a first protruding portion protruding beyond a bottom face of the first recessed portion.
An apparatus for forming a pattern, comprising:
- a replica template including a first substrate;
- and
- a master template including a second substrate;
- wherein the first substrate has a first surface, a first recessed portion recessed below the first surface, and a first protruding portion protruding beyond a bottom face of the first recessed portion,
- wherein the second substrate has a second surface and a second recessed portion recessed below the second surface,
- wherein the first protruding portion has a form that is an inversion of the second recessed portion, and
- wherein the second substrate does not have a protruding portion that has a form that is an inversion of the first recessed portion.
Dependencies are inferred from the claim text.