Back to results
US 2024/0201557 A1Published application
Spatial light modulators, methods of operating and manufacturing the same, and apparatus including spatial light modulator
AssigneeSamsung Electronics Co., Ltd.
InventorsSunil KIM, Minkyung LEE, Junghyun PARK, Byunggil JEONG
Life of this patent
Estimating the term…
Abstract
A spatial light modulator includes a substrate, a blocking layer provided on one surface of the substrate, a lower reflective layer provided on the blocking layer, an upper reflective layer facing the lower reflective layer, and a cavity layer provided between the upper reflective layer and the lower reflective layer, where the blocking layer includes a plurality of holes configured to block heat transferred from the upper reflective layer to the substrate.
Claims20
A spatial light modulator comprising:
- a substrate;
- a blocking layer provided on one surface of the substrate;
- a lower reflective layer provided on the blocking layer;
- an upper reflective layer facing the lower reflective layer;
- and
- a cavity layer provided between the upper reflective layer and the lower reflective layer,
- wherein the blocking layer comprises a plurality of holes configured to block heat transferred from the upper reflective layer to the substrate.
4 more elements
Dependencies are inferred from the claim text.