Optical part assembly
AssigneeDisco Corporation
InventorKeiji NOMARU
Life of this patent
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AssigneeDisco Corporation
InventorKeiji NOMARU
Estimating the term…
An optical part assembly includes a mirror main body including a base and a mirror support section that is formed integral with the base and having a projected tip, a mirror mounted on the projected tip of the mirror support section, a casing having in its tip part an opening in which the mirror support section is exposed, and having a rear end part closed with a bottom plate, a plurality of driving sections that are disposed on the bottom plate of the casing and act on the base to swing the base, a ring member that has an opening and is fixed to a front end part of the casing, and a bellows seal of which one end makes contact with a front end of the base and the other end makes contact with the ring member to surround the mirror support section.
An optical part assembly comprising:
Dependencies are inferred from the claim text.