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US 2024/0201438 A1Published application
Photodetectors with a tapered interface
AssigneeGlobalFoundries U.S. Inc.
InventorYusheng Bian
Life of this patent
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Abstract
Structures including a photodetector and methods of forming a structure including a photodetector. The structure comprises a photodetector including a pad having a side edge and a light-absorbing layer disposed on the pad. The structure further comprises a waveguide core including a tapered section positioned adjacent to the side edge of the pad and the light-absorbing layer. The tapered section has a width dimension that decreases with decreasing distance from the side edge of the pad.
Claims20
A structure comprising:
- a photodetector including a pad having a first side edge and a light-absorbing layer disposed on the pad;
- and
- a first waveguide core including a tapered section positioned adjacent to the first side edge of the pad and the light-absorbing layer, the tapered section having a first width dimension that decreases with decreasing distance from the first side edge of the pad.
A method comprising:
- forming a photodetector including a pad having a side edge and a light-absorbing layer disposed on the pad;
- and
- forming a waveguide core including a tapered section positioned adjacent to the side edge of the pad and the light-absorbing layer, wherein the tapered section has a width dimension that decreases with decreasing distance from the side edge of the pad.
Dependencies are inferred from the claim text.