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US 2024/0201435 A1Published application
Compact optical resonator with enhancement features
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorWen-Hao Cheng
Life of this patent
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Abstract
The present disclosure provides an embodiment of a photonics structure that includes a ring optical waveguide on a substrate; a rail optical waveguide configured to couple a light into the ring optical waveguide; and enhancement features configured around the ring optical waveguide and the rail optical waveguide to enhancement the photonic structure.
Claims20
A photonics structure, comprising:
- a ring optical waveguide on a substrate;
- a rail optical waveguide configured to couple a light into the ring optical waveguide;
- and
- enhancement features configured around the ring optical waveguide and the rail optical waveguide to enhancement the photonic structure.
1 more element
A photonics structure, comprising:
- a first ring optical waveguide on a substrate;
- a first rail optical waveguide configured to couple a first light into the first ring optical waveguide;
- first enhancement features configured around the first ring optical waveguide and the first rail optical waveguide;
- a second ring optical waveguide on the substrate;
- a second rail optical waveguide configured to couple a second light into the second ring optical waveguide;
- and
- second enhancement features configured around the second ring optical waveguide and the second rail optical waveguide, wherein
- the first ring optical waveguide, the first rail optical waveguide and the first enhancement features are positioned at a first level over the substrate,
- the second ring optical waveguide, the second rail optical waveguide and the second enhancement features are positioned at a second level over the substrate, and
- the second level is different from the first level.
7 more elements
A photonics structure, comprising:
- a first optical ring resonator on a substrate at a first level, wherein the first optical ring resonator further includes a first ring optical waveguide, a first rail optical waveguide configured to couple a first light into the first ring optical waveguide, and first enhancement features configured around the first ring optical waveguide and the first rail optical waveguide;
- a second optical ring resonator on the substrate at a second level, wherein the second optical ring resonator further includes a second ring optical waveguide, a second rail optical waveguide configured to couple a second light into the second ring optical waveguide, and second enhancement features configured around the second ring optical waveguide and the second rail optical waveguide;
- and
- a third optical ring resonator on the substrate at a third level, wherein the third optical ring resonator further includes a third ring optical waveguide, a third rail optical waveguide configured to couple a third light into the third ring optical waveguide, and third enhancement features configured around the third ring optical waveguide and the third rail optical waveguide, wherein
- the first, second and third levels are different from each other,
- the first, second and third ring optical waveguides are vertically aligned, and
- the first, second and third enhancement features have a width less than that of the first, second, and third ring optical waveguides.
4 more elements
Dependencies are inferred from the claim text.