Magnetic sensor
AssigneeTDK Corporation
InventorsNorikazu OTA, Hiraku HIRABAYASHI
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Abstract
A magnetic sensor includes an insulating layer having a first inclined surface, a plurality of first MR elements disposed on the first inclined surface, and a plurality of first magnetic field generators disposed on the first inclined surface and configured to generate a magnetic field to be applied to the plurality of first MR elements. Each of the plurality of first magnetic field generators includes a ferromagnetic material section and an antiferromagnetic material section. The ferromagnetic material section and the antiferromagnetic material section are stacked in a direction intersecting the first inclined surface.
Claims17
A magnetic sensor comprising:
- a support member having at least one inclined surface inclined relative to a reference plane;
- at least one magnetic detection element disposed on the at least one inclined surface and configured to detect a target magnetic field;
- and
- at least one magnetic field generator disposed on the at least one inclined surface and configured to generate a magnetic field to be applied to the at least one magnetic detection element, wherein
- the at least one magnetic field generator includes a ferromagnetic material section and an antiferromagnetic material section that is in contact with the ferromagnetic material section and is in exchange coupling with the ferromagnetic material section, and
- the ferromagnetic material section and the antiferromagnetic material section are stacked in a direction intersecting the at least one inclined surface.
Dependencies are inferred from the claim text.