Particle analyzing device, and particle analyzing method
AssigneeHitachi High-Tech Corporation
InventorsAkiko HISADA, Yuusuke OOMINAMI, Erino MATSUMOTO
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AssigneeHitachi High-Tech Corporation
InventorsAkiko HISADA, Yuusuke OOMINAMI, Erino MATSUMOTO
Estimating the term…
In a particle analyzing device for analyzing a predetermined particle to be analyzed, placed on an instrument, with an electron microscope, the particle analyzing device acquires a first standard value and a second standard value regarding brightness in an electron microscope image, the particle analyzing device acquires an electron microscope image and a signal profile generated by irradiating the instrument and the particle with an electron beam, and the particle analyzing device adjusts brightness of the electron microscope image based on the first standard value, the second standard value, and the signal profile.
A particle analyzing device for analyzing a predetermined particle to be analyzed, placed on an instrument, with an electron microscope, wherein
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A particle analyzing method for analyzing a predetermined particle to be analyzed, placed on an instrument, with an electron microscope, the particle analyzing method comprising:
Dependencies are inferred from the claim text.