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US 2024/0201100 A1Published application
Substrate inspection device and substrate inspection method using the same
AssigneeSamsung Display Co., Ltd.
InventorsSUNG HUNE YOO, DONGWOOK LEE
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Abstract
A substrate inspection device includes an imaging part that is disposed in a chamber and obtains an input image by photographing a substrate coated with a solution, and an analysis part that converts brightness data of the input image into grayscale data and analyzes a film shape of a pixel region based on the grayscale data.
Claims20
A substrate inspection device comprising:
- an imaging part that is disposed in a chamber and obtains an input image by photographing a substrate coated with a solution;
- and
- an analysis part that converts brightness data of the input image into grayscale data and analyzes a film shape of a pixel region based on the grayscale data.
A substrate inspection method comprising:
- disposing a substrate coated with a solution in a chamber;
- obtaining an input image by photographing the substrate;
- and
- analyzing a film shape of a pixel region based on grayscale data by converting brightness data of the input image into grayscale data.
1 more element
Dependencies are inferred from the claim text.