Photoacoustic gas sensor, and method for producing same
AssigneeTechnische UniversitäT Dortmund
InventorStefan PALZER
Life of this patent
Estimating the term…
Abstract
A method for producing a photoacoustic gas sensor for a target gas, having the steps of a) providing a wafer made of silicon, having a front face and a rear face. The wafer having a buried insulating layer within the silicon. The method including b) providing a suspended thermal emitter having a first cavity on the rear face of the wafer. The method including c) providing a sound-sensitive element on the front face of the wafer, the sound-sensitive element having a second cavity in which the target gas is enclosed. The additionally relates to a photoacoustic gas sensor for a target gas.
Claims11
Method for producing a photoacoustic gas sensor for a target gas, comprising the following steps:
- a) Provision of a wafer made of silicon having a front side and a back side, wherein the wafer includes a buried insulation layer within the silicon;
- b) Implementation of a suspended thermal emitter including a first cavity on the back side of the wafer;
- c) Implementation of an acoustically sensitive element on the front side of the wafer, wherein the acoustically sensitive element includes a second cavity in which the target gas is contained,
- wherein steps b) and c) are implemented by means of photolithographic processes and etching processes in such a manner that the first cavity and the second cavity are separated from one another solely by the buried insulation layer.
Photoacoustic gas sensor for a target gas, comprising a thermal emitter, a measuring volume designed as a first cavity and an acoustically sensitive element, wherein a gas and/or gas mixture to be analyzed can flow through the measuring volume, wherein the acoustically sensitive element includes a second cavity in which the target gas is contained, and wherein the first cavity and the second cavity are separated from one another solely by a buried insulation layer of a silicon wafer used for production.
Dependencies are inferred from the claim text.