Micromechanical rotation rate sensor comprising a sensor element and a method for operating a micromechanical rotation rate sensor comprising a sensor element

A method for operating a micromechanical rotation rate sensor with a sensor element, wherein the micromechanical rotation rate sensor includes a drive device configured to drive an oscillation of the sensor element along a drive direction and an acquisition device configured to acquire a measurement signal generated using the sensor element, wherein the acquisition device includes a first electrode structure and a second electrode structure configured to acquire a mechanical deflection or a force effect of the sensor element parallel to an acquisition direction provided substantially perpendicular to the drive direction, wherein the sensor element is subjected to a predetermined voltage, and both the first electrode structure and the second electrode structure are disposed along the acquisition direction relative to the sensor element in such a way that a variable capacitance is formed between the sensor element and the first electrode structure and between the sensor element and the second electrode structure, wherein the acquisition device is configured for differential acquisition of the variable capacitances, wherein the variable capacitances each including a static capacitance component and a dynamic capacitance component provided for an opposite variation, wherein the micromechanical rotation rate sensor is configured such that it can be operated in a test operating mode and in an operational operating mode, wherein the method comprises:

• operating the micromechanical rotation rate sensor in the test operating mode, wherein, during the test operating mode, the sensor element is acted upon by a variation of the predetermined voltage;
• and
• operating the micromechanical rotation rate sensor in the operational operating mode, wherein, during the operational operating mode, the sensor element is statically subjected to the predetermined voltage;
• ascertaining the static capacitance component using the variation of the predetermined voltage, wherein the test operating mode is used to ascertain the static capacitance component at different times or continuously in order to detect changes in the static capacitance component;
• and
• adjusting, using the detected changes in the static capacitance component, further parameters of the rotation rate sensor including its sensitivity and/or a phase shift of the acquisition device and/or the predetermined voltage to which the sensor element is subjected.