US 2024/0200939 A1 · COMPUTER SYSTEM, DIMENSION MEASUREMENT METHOD, AND STORAGE MEDIUM

Abstract

A computer system providing a function for: extracting, from image data of a semiconductor pattern, coordinate information of a base point for measuring a dimension of a desired location of the semiconductor pattern; and measuring the dimension using the coordinate information of the base point. The computer system includes a training device in which a pose estimation model for outputting coordinate information of at least two base points as a training result is implemented. The training device is trained in advance using teacher data having the image data of the semiconductor pattern as an input and the coordinate information of at least two base points as an output, and extracts, for new image data input into the training device, the coordinate information of at least two base points and a dimension.

Claims15

Dependent claims

A computer system for providing a function for:

extracting, from image data of a semiconductor pattern, coordinate information about a base point for measuring a dimension of a desired location of the semiconductor pattern;
and measuring the dimension using the coordinate information of the base point,
the computer system comprising a training device in which a pose estimation model for outputting the coordinate information of at least two of the base points as a training result is implemented,
wherein the training device is trained in advance using teacher data having image data of the semiconductor pattern as an input and the coordinate information of the at least two base points as an output,
the computer system, with respect to new image data input into the training device, extracting the coordinate information of the at least two base points and the dimension.

2 more elements

A dimension measurement method comprising, using a computer system, extracting, from image data of a semiconductor pattern, coordinate information of a base point for measuring a dimension of a desired location of the semiconductor pattern, and measuring the dimension using the coordinate information of the base point,

the method comprising the computer system inputting, into a pose estimation model trained to automatically design a skeleton including at least two base points on the semiconductor pattern as keypoints, and to output coordinate information of the keypoints, image data of an object to be measured including the semiconductor pattern, and generating coordinate information of the keypoints of the image data that has been input,
and the computer system measuring the dimension using the coordinate information of the keypoints of the image data of the object to be measured,
the pose estimation model being trained using teacher data having the image data of the semiconductor pattern as an input and the coordinate information of the at least two base points as an output.

Dependencies are inferred from the claim text.

Computer system, dimension measurement method, and storage medium

Life of this patent

Computer system, dimension measurement method, and storage medium

Life of this patent

Abstract

Claims15