Cryopump, method of manufacturing cryopump, and method of using cryopump

A cryopump comprising:

• a cryocooler;
• a cryopump vacuum chamber;
• a vibration-proof structure that connects the cryocooler to the cryopump vacuum chamber;
• and
• a first attachment portion and a second attachment portion to which a removable restraint that restrains both of expansion and contraction of the vibration-proof structure between the cryocooler and the cryopump vacuum chamber is attachable, wherein
• the first attachment portion is formed in the cryopump vacuum chamber or in a first end portion of the vibration-proof structure toward the cryopump vacuum chamber, and
• the second attachment portion is formed in the cryocooler or in a second end portion of the vibration-proof structure toward the cryocooler.

A method of manufacturing a restraint-attached cryopump, the method comprising:

• preparing a cryopump;
• and
• attaching a removable restraint to the cryopump,
• wherein the cryopump includes a cryocooler, a cryopump vacuum chamber, and a vibration-proof structure that connects the cryocooler to the cryopump vacuum chamber, and
• the removable restraint connects the cryocooler to the cryopump vacuum chamber in parallel to the vibration-proof structure and restrains both of expansion and contraction of the vibration-proof structure between the cryocooler and the cryopump vacuum chamber.

A method of using a cryopump, the method comprising:

• preparing a cryopump to which a removable restraint is attached;
• and
• removing the removable restraint from the cryopump,
• wherein the cryopump includes a cryocooler, a cryopump vacuum chamber, and a vibration-proof structure that connects the cryocooler to the cryopump vacuum chamber, and
• the removable restraint connects the cryocooler to the cryopump vacuum chamber in parallel to the vibration-proof structure and restrains both of expansion and contraction of the vibration-proof structure.