Ingot growing apparatus
AssigneeHanwha Solutions Corporation
InventorsJin Sung PARK, Han Woong JEON, Kyung Seok LEE, Keun Ho KIM, Young Min LEE
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AssigneeHanwha Solutions Corporation
InventorsJin Sung PARK, Han Woong JEON, Kyung Seok LEE, Keun Ho KIM, Young Min LEE
Estimating the term…
An ingot growing apparatus, according to an embodiment of the present invention, comprises: a growth furnace in which a main crucible accommodating molten silicon for growing an ingot is disposed; a preliminary melting part which receives and melts a solid silicon material and a dopant, and has a preliminary crucible that supplies the molten silicon to the main crucible; a transfer part which transfers the solid silicon material and the dopant to the preliminary crucible; a silicon supply part which supplies the solid silicon material to the transfer part; and a dopant supply part which is disposed on an upper side of the transfer part and supplies the dopant to the transfer part according to a concentration of the dopant melted in the main crucible.
An ingot growing apparatus, comprising:
Dependencies are inferred from the claim text.