Thin film deposition apparatus
AssigneeSamsung Display Co., Ltd.
InventorsChoong-Ho Lee, Jung-Min Lee
Life of this patent
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Abstract
A thin film deposition apparatus used to produce large substrates on a mass scale and improve manufacturing yield. The thin film deposition apparatus includes a deposition source; a first nozzle disposed at a side of the deposition source and including a plurality of first slits arranged in a first direction; a second nozzle disposed opposite to the first nozzle and including a plurality of second slits arranged in the first direction; and a barrier wall assembly including a plurality of barrier walls arranged in the first direction so as to partition a space between the first nozzle and the second nozzle.
Claims2
A thin film deposition apparatus to form a thin film on a substrate, the thin film deposition apparatus comprising:
- a deposition source to discharge a deposition material;
- a first nozzle disposed at a side of the deposition source and including a plurality of first slits arranged in a first direction;
- a second nozzle disposed opposite to the first nozzle and including a plurality of second slits arranged in the first direction;
- and
- a barrier wall assembly including a plurality of barrier walls arranged in the first direction between the first nozzle and the second nozzle so as to partition a space between the first nozzle and the second nozzle into a plurality of sub-deposition spaces.
A method of manufacturing a second nozzle in a thin film apparatus having a first nozzle, the second nozzle, and first and second barrier wall assemblies, the method comprising:
- applying an initial tensile force to the second nozzle;
- applying a compression force to a second nozzle frame of the thin film apparatus;
- and
- binding the second nozzle to the second nozzle frame of the thin film apparatus such that the compression force and the initial tensile force are relieved from the second nozzle and the second nozzle frame, respectively, and only a resulting tensile force is exerted on the second nozzle.
Dependencies are inferred from the claim text.