Article transferring apparatus and article transferring method

An article transferring apparatus, comprising:

• a main rail provided along a ceiling of a substrate manufacturing line in which process modules for treating a substrate are arranged;
• a main transferring vehicle moving along the main rail and loading and unloading a container containing a substrate to and from the process module;
• a sub-rail installed on a ceiling corresponding to an upper portion of the process module;
• and
• a sub-transferring vehicle moving along the sub-rail and dedicated to loading and unloading a container between a first loading part and a second loading part of the process module;
• and
• a control unit for outputting a transfer command of the container to the main transferring vehicle and the sub-transferring vehicle,
• wherein the control unit stops transferring the container of the sub-transferring vehicle when the main transferring vehicle loads or unloads the container to or from the first loading part or the second loading part to prevent a collision between the main transferring vehicle and the sub-transferring vehicle,
• the main transferring vehicle loads a container containing a substrate that is not process-treated to the first loading part, and unloads a container containing a substrate that has been process-treated from the second loading part,
• the sub-transferring vehicle transfers the container from the first loading part to the second loading part, and
• the container transferred by the sub-transferring vehicle is in an empty state in which the substrate that is not process-treated has been inserted into the process module.