Piezoelectric element, liquid ejection head, and liquid ejection apparatus
AssigneeCanon Kabushiki Kaisha
InventorsREI KURASHIMA, SHOGO TAZAWA
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AssigneeCanon Kabushiki Kaisha
InventorsREI KURASHIMA, SHOGO TAZAWA
Estimating the term…
A piezoelectric element includes a first electrode provided on a substrate, a piezoelectric layer provided stacked on the first electrode, a second electrode provided stacked on the piezoelectric layer, an insulation layer, and a first wiring electrode. The insulation layer is provided in such a manner as to cover at least portions of the piezoelectric layer and the second electrode. The first wiring electrode is provided in such a manner as to cover at least a portion of the insulation layer and is electrically connected to the second electrode via a first contact hole. In plan view of the piezoelectric layer, a periphery of the first electrode and a periphery of the piezoelectric layer overlap in a region where the piezoelectric layer and the first wiring electrode overlap, and at least a portion of a periphery of the second electrode is positioned in a region of the piezoelectric layer.
A piezoelectric element comprising:
A liquid ejection head comprising:
A liquid ejection apparatus equipped with a liquid ejection head, the liquid ejection head comprising:
Dependencies are inferred from the claim text.