Control unit and substrate treating apparatus including the same

A control unit for controlling an inkjet head unit, which ejects a substrate treating solution onto a substrate for treating the substrate, comprising:

• a droplet position acquisition module acquiring positions of a plurality of droplets;
• a statistical value calculation module calculating statistical values related to a position reproducibility of the droplets based on the positions of the droplets;
• a comparison module comparing the statistical values with a threshold value;
• and
• a processing module instructing the replacement of the inkjet head unit if the statistical values are determined to exceed the threshold value.

A substrate treating apparatus comprising:

• a process treatment unit supporting a substrate;
• an inkjet head unit ejecting a substrate treating solution onto the substrate in the form of a droplet;
• a gantry unit moving the inkjet head unit;
• and
• a control unit controlling the inkjet head unit,
• wherein
• the control unit determines whether to replace the inkjet head unit based on a position reproducibility of the droplet,
• the inkjet head unit includes a plurality of packs,
• each of the packs includes a plurality of head modules,
• each of the head modules includes a plurality of nozzles,
• the packs are classified into multiple groups depending on colors of the substrate treating solution,
• the control unit includes a droplet position acquisition module, which acquires positions of a plurality of droplets, a statistical value calculation module, which calculates statistical values based on the positions of the droplets, a comparison module, which compares the statistical value with a threshold value, and a processing module, which instructs the replacement of the inkjet head unit if the statistical values exceed the threshold value,
• the statistical value calculation module calculates head-specific standard deviations for a plurality of head modules with a plurality of nozzles, pack-specific standard deviations for a plurality of packs with a plurality of head modules, and color-specific standard deviations by classifying the plurality of packs by color,
• the statistical value calculation module calculates the pack-specific standard deviations based on the head-specific standard deviations and calculates the color-specific standard deviations based on the pack-specific standard deviations,
• the comparison module determines whether each of the head-specific standard deviations, pack-specific standard deviations, and color-specific standard deviations exceed the threshold value, and
• if any one of the head-specific standard deviations, pack-specific standard deviations, and color-specific standard deviations is determined to exceed the threshold value, the processing module instructs the replacement of a corresponding component within the inkjet head unit.