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US 2024/0198538 A1Published application
End effector and substrate processing apparatus including end effector
AssigneeASM IP Holding B.V.
InventorTaira Okabe
Life of this patent
Estimating the term…
Abstract
An End effector is disclosed. The exemplary end effector includes a substrate-supporting body for placing the substrate thereon; and a first array of wave generators disposed in the substrate-supporting body and configured to generate a surface wave to a backside of the substrate.
Claims12
An end effector for transferring a substrate, comprising:
- a substrate-supporting body for placing the substrate thereon;
- and
- a first array of wave generators disposed in the substrate-supporting body and configured to generate a surface wave to a backside of the substrate.
A method for positioning a substrate, comprising:
- placing a substrate on an array of wave generators disposed on an end effector;
- and
- applying waves to the substrate by the array of wave generators, thereby correcting a position of the substrate.
Dependencies are inferred from the claim text.