Substrate conveyor robot and substrate conveying apparatus

A substrate conveying apparatus comprising:

• a substrate conveyor robot including a robot arm that includes a holder configured to hold a substrate and arranged in a free end of the robot arm, and an up-and-down driving mechanism that includes a stationary part including a guide rail extending in an upward/downward direction, and an up-and-down mover configured to move upward and downward along the guide rail whereby moving the robot arm upward and downward;
• a guide rail cover arranged on a lateral side of the guide rail to cover an upper part of the guide rail that is exposed toward the lateral side when the up-and-down mover moves downward, and included in the up-and-down mover;
• and
• a robot compartment configured to accommodate the substrate conveyor robot, wherein
• the robot arm includes a base link that is connected to the up-and-down mover turnably in a horizontal direction, and is arranged at a height equal to the guide rail cover in the upward/downward direction, and a free-end side link that is connected to the base link turnably in the horizontal direction, and includes one or more arm parts having the free end, and
• a rotation center of the base link is spaced away from the guide rail cover as viewed from a top side so that the shortest distance between the guide rail cover and the rotation center of the base link is greater than the maximum turn radius of the base link with the upper part of the guide rail being covered by the guide rail cover in a lowered position of the up-and-down mover.