Pad conditioner with pyramids of single-crystal diamond

A pad conditioner with pyramids of single-crystal diamond, comprising:

• a substrate;
• a plurality of single crystal diamond sheets provided on the substrate, each of the single crystal diamond sheets including a plurality of single crystal diamond protrusions extended upward away from the substrate, each of the single crystal diamond protrusion having a tip height;
• wherein a highest tip height is defined in the single crystal diamond sheet;
• wherein the single crystal diamond protrusions of the pad conditioner satisfy the following requirements:
• a number of the single crystal diamond protrusions with the tip height greater than 60 μm is more than ten;
• a number of the single crystal diamond protrusions with a height difference greater than 60 μm compared to the highest tip height is more than ten;
• and
• a spacing between the adjacent single crystal diamond protrusions is at least two times the tip height.