Apparatus and method for measuring flow conductance of showerhead assembly

A flow conductance measuring device comprising:

• a pressure controller configured to:
• supply intake gas to a showerhead assembly at a first pressure value;
• and
• measure a flow throughput of the supplied intake gas;
• a pressure transducer configured to measure a second pressure value of an exhaust gas, which comprises the intake gas being expelled from the showerhead assembly;
• a controller configured to determine a flow conductance of the showerhead assembly based on the flow throughput, the first pressure value, and the second pressure value.

A method comprising:

• causing, by a controller, an intake gas to be supplied to a showerhead assembly via an intake conduit at a first pressure value;
• receiving an indication of a flow throughput of the intake gas;
• receiving an indication of a second pressure value, of an exhaust gas being expelled from the showerhead assembly, measured at an exhaust conduit coupled to the showerhead assembly;
• and
• determining, based on the flow throughput, the first pressure value, and the second pressure value, a flow conductance of the showerhead assembly.