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US 2024/0198250 A1Published application
Vaporizer and liquid material vaporizing device
AssigneeHORIBA STEC, Co., Ltd.
InventorKeisuke NISHIWAKI
Life of this patent
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Abstract
A vaporizer includes a vaporization chamber in which a liquid material is heated and vaporized and a heat exchange element arranged in the vaporization chamber. The vaporization chamber has a groove in its inner surface. This helps improve vaporization performance of the liquid material and the vaporization of the liquid material at a high flow rate.
Claims16
A vaporizer comprising:
- a vaporization chamber in which a liquid material is heated and vaporized;
- and
- a heat exchange element arranged in the vaporization chamber,
- wherein
- the vaporization chamber has a groove in an inner surface thereof.
2 more elements
A vaporizer comprising:
- a vaporization chamber in which a liquid material is heated and vaporized;
- and
- a heat exchange element arranged in the vaporization chamber,
- wherein
- the heat exchange element is configured as a static mixer with a plurality of fins coupled together along the center axis, and
- at least one of the plurality of fins has an opening.
3 more elements
Dependencies are inferred from the claim text.