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US 2024/0196630 A1Published application
Memory device structure and fabrication method
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsLiang CHEN, Wei LIU, YONGNA LI, Huaguo SHENG
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Abstract
A 3D memory device includes a complementary metal-oxide-semiconductor (CMOS) structure having a page buffer region and a string driver region respectively corresponding to a cell region and a string region in an array structure, wherein the CMOS structure further includes a plurality of page buffers in a folded structure formed in the page buffer region; and string driver circuits formed in the string region.
Claims20
A three-dimensional (3D) memory device, comprising:
- a complementary metal-oxide-semiconductor (CMOS) structure having a page buffer region and a string driver region respectively corresponding to a cell region and a string region in an array structure,
- wherein the CMOS structure further includes a plurality of page buffers in a folded structure formed in the page buffer region;
- and string driver circuits formed in the string region.
A memory system, comprising:
- a 3D memory device, including a complementary metal-oxide-semiconductor (CMOS) structure having a page buffer region and a string driver region respectively corresponding to a cell region and a string region in an array structure, a plurality of page buffers in a folded structure formed in the page buffer region;
- and string driver circuits formed in the string region;
- a memory controller coupled to the 3D memory device for controlling the 3D memory device;
- and
- an external interface for communicating with a host for storing information in the 3D memory device.
2 more elements
A method for forming a three-dimensional (3D) memory device, comprising:
- forming an array wafer having a cell region and a string region, including:
- providing a first substrate having the cell region and the string region;
- forming a plurality of memory cells on the first substrate in the cell region;
- and forming a string structure on the first substrate in the string region;
- forming a complementary metal-oxide-semiconductor (CMOS) wafer having a page buffer region and a string driver region respectively corresponding to the cell region and the string region, including:
- providing a second substrate having the page buffer region and the string driver region;
- forming a plurality of page buffers in a folded structure in the page buffer region;
- and forming string driver circuits in the string region;
- bonding the array wafer and the CMOS wafer at a bonding interface;
- and
- forming the 3D memory device based on the bonded array wafer and CMOS wafer.
8 more elements
Dependencies are inferred from the claim text.