Fuse structure with metal heater and heat spreading structure for fuse body
AssigneeGlobalFoundries U.S. Inc.
InventorsShesh Mani Pandey, Mark D. Levy, Chung Foong Tan
Life of this patent
Estimating the term…
Abstract
A fuse structure includes a fuse body including a polysilicon, and a metal heater over the fuse body. The fuse structure also includes a heating spreading structure thermally coupled to the metal heater and extending horizontally adjacent to at least one side of the fuse body. The metal heater can be a portion of a metal wire or a resistor including a resistive metal. The heat spreading structure may include a plurality of metal contacts.
Claims20
A fuse structure, comprising:
- a fuse body including a polysilicon;
- a metal heater over the fuse body;
- and
- a heating spreading structure thermally coupled to the metal heater and extending horizontally adjacent to at least one side of the fuse body.
A fuse structure comprising:
- a fuse body on a dielectric layer, the fuse body including a polysilicon;
- a first fuse electrode and a second fuse electrode coupled to respective opposite ends of the fuse body;
- a metal heater above the fuse body and laterally overlapping at least a portion of the fuse body;
- a first heater electrode and a fourth heater electrode coupled to respective opposite ends of the metal heater and defining an electrical current path through the metal heater;
- a heat spreading structure extending adjacent to the fuse body, the heat spreading structure coupled to the metal heater.
A method for heating a fuse in an integrated circuit (IC) structure, the fuse including a fuse body including polysilicon, the method comprising:
- heating an area over the fuse body using a metal heater;
- and
- spreading heat from the metal heater through a heat spreading structure thermally coupled to the metal heater and extending horizontally adjacent to at least one side of the fuse body.
Dependencies are inferred from the claim text.