Method and apparatus with semiconductor pattern correction
AssigneeSamsung Electronics Co., Ltd.
InventorsSeong-Jin PARK, Seon Min RHEE, Jaewon YANG
Life of this patent
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Abstract
A processor-implemented method including generating a first corrected result image of a first desired pattern image using a backward correction neural network provided an input based on the first desired pattern image, the backward correction neural network performing a backward correction of a first process, generating a first simulated result image using a forward simulation neural network based on the first corrected result image, the forward simulation neural network performing a forward simulation of a performance of the first process, and updating the first corrected result image so that an error between the first desired pattern image and the first simulated result image is reduced.
Claims20
A processor-implemented method, the method comprising:
- generating a first corrected result image of a first desired pattern image using a backward correction neural network based on the first desired pattern image, the backward correction neural network performing a backward correction of a first process;
- generating a first simulated result image by executing a forward simulation neural network based on the first corrected result image, the forward simulation neural network performing a forward simulation of a performance of the first process;
- and
- updating the first corrected result image so that an error between the first desired pattern image and the first simulated result image is reduced.
An apparatus, comprising:
- a processor configured to execute instructions;
- and
- a memory storing the instructions, wherein execution of the instructions configures the processor to:
- generate a first corrected result image of a first desired pattern image using a backward correction neural network provided a first input based on the first desired pattern image, the backward correction neural network performing a backward correction of a first process;
- generate a first simulated result image using a forward simulation neural network based on the first corrected result image, the forward simulation neural network performing a forward simulation of a performance of the first process;
- and
- update the first corrected result image so that an error between the first desired pattern image and the first simulated result image is reduced.
A processor-implemented method, the method comprising:
- training a backward correction neural network based on input pattern images corresponding to a simulation input of a target process;
- training a forward simulation neural network based on output pattern images corresponding to a simulation output of the target process;
- generating, by the backward correction neural network, a corrected image based on a pattern image;
- generating, by the forward simulation neural network, a simulated result image based on the corrected image;
- and
- adjusting parameters of the backward correction neural network according to an error between the simulated result image and the pattern image.
Dependencies are inferred from the claim text.