Free-form layout feature retargeting
AssigneeSiemens Industry Software Inc.
InventorsVladislav Liubich, Avneet Kaur, George P Lippincott
Life of this patent
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Abstract
Various aspects of the present disclosed technology relate to techniques for retargeting free-form layout features. In a retargeting process, anchor points are selected on boundary lines of layout features based on one or more predetermined conditions. Property values comprising spacing values and linewidth values for each of the anchor points are then determined. Based on the determined property values, positions of the anchor points are adjusted to derive new anchor points. Retargeted layout features are derived by using splines as interpolating curves passing through the new anchor points or as approximating curves passing near to but not necessarily through the new anchor points.
Claims20
A method, executed by at least one processor of a computer, comprising:
- selecting anchor points on boundary lines of layout features based on one or more predetermined conditions;
- determining property values for each of the anchor points, the property values comprising spacing values and linewidth values;
- adjusting positions of the anchor points based on the determined property values to derive new anchor points;
- and
- deriving retargeted layout features by using splines as interpolating curves passing through the new anchor points or as approximating curves passing near to but not necessarily through the new anchor points.
One or more non-transitory computer-readable media storing computer-executable instructions for causing one or more processors to perform a method, the method comprising:
- selecting anchor points on boundary lines of layout features based on one or more predetermined conditions;
- determining property values for each of the anchor points, the property values comprising spacing values and linewidth values;
- adjusting positions of the anchor points based on the determined property values to derive new anchor points;
- and
- deriving retargeted layout features by using splines as interpolating curves passing through the new anchor points or as approximating curves passing near to but not necessarily through the new anchor points.
A system, comprising:
- one or more processors, the one or more processors programmed to perform a method, the method comprising:
- selecting anchor points on boundary lines of layout features based on one or more predetermined conditions;
- determining property values for each of the anchor points, the property values comprising spacing values and linewidth values;
- adjusting positions of the anchor points based on the determined property values to derive new anchor points;
- and
- deriving retargeted layout features by using splines as interpolating curves passing through the new anchor points or as approximating curves passing near to but not necessarily through the new anchor points.
Dependencies are inferred from the claim text.