Device inspection apparatus and device inspection method

Abstract

A device inspection apparatus according to one aspect of the present disclosure includes a voltage source configured to apply a voltage to a device to be inspected, a plurality of resistors connected in series between the voltage source and the device, a detector configured to detect a potential difference across both ends of a resistor group that includes one or more resistors among the plurality of resistors, a switching device configured to switch the resistor group from which the detector detects the potential difference among the plurality of resistors, and a controller, wherein the controller is configured to control the detector and the switching device, so as to detect a potential difference across both ends of at least two or more different resistor groups, and is configured to control the detector and the switching device to detect the potential difference in an ascending order of a combined resistance value between both ends of the at least two or more resistor groups.

Dependencies are inferred from the claim text.