Method of forming a layer comprising magnesium, aluminum, and zinc, and related solids and systems

A method comprising

• providing a substrate to a reaction chamber;
• executing a cyclical deposition process, the cyclical deposition process comprising a plurality of super cycles, ones from the plurality of super cycles comprising
• a magnesium sub cycle comprising a magnesium precursor pulse and a first reactant pulse, the magnesium precursor pulse comprising providing a magnesium precursor comprising magnesium, and the first reactant pulse comprising providing a first reactant;
• an aluminum sub cycle comprising an aluminum precursor pulse and a second reactant pulse, the aluminum precursor pulse comprising providing an aluminum precursor comprising aluminum, and the second reactant pulse comprising providing a second reactant;
• and,
• a zinc sub cycle comprising a zinc precursor pulse and a third reactant pulse, the zinc precursor pulse comprising providing a zinc precursor comprising zinc, and the third reactant pulse comprising providing a third reactant,
• wherein at least one super cycle comprises at least two magnesium sub cycles, aluminum sub cycles, or zinc sub cycles, and
• thereby forming a layer comprising aluminum, zinc, and magnesium on the substrate.