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US 2024/0189012 A1Published application
Plasma gas generator
OwnerThomas J. SHEPERAKinventor
Life of this patent
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Abstract
A method of generating an output gas, comprising plasmatizing an input gas with RF power propagating from a tip of an electrode to form an annular plasma sheath constrained by a tube with said RF power propagating within said annular plasma sheath; and forming said output gas as said annular plasma sheath propagates away from said tip of said electrode.
Claims20
A method of generating an output gas, comprising:
- plasmatizing an input gas with RF power propagating from a tip of an electrode to form an annular plasma sheath constrained by a tube with said RF power propagating within said annular plasma sheath;
- and
- forming said output gas as said annular plasma sheath propagates away from said tip of said electrode.
A gas generator system, comprising:
- a radio frequency (RF) power source;
- and
- at least one reactor having a first end and a second end, said reactor comprising at least,
- a gas input at said first end for receiving an input gas from a gas source;
- an elongated tube having an axis;
- an electrode disposed at said first end with at least a portion of said electrode axially disposed within said tube, said electrode operatively connected to said RF power source, said electrode having a tip configured to emit said RF power such said RF power propagates axially along said tube, said electrode defining a channel for receiving said input gas from said gas input and for exhausting said input gas into said tube such that said input gas flows axially and laminarly along said tube;
- a gas output in fluid communication with said tube to receive an output gas from said tube;
- wherein said RF power from said electrode and said flow of said input gas along said tube are sufficient for said RF power to plasmatize said input gas to form an annular plasma sheath constrained by said tube with said RF power propagating within said sheath;
- wherein said output gas forms from said annular plasma sheath as said annular plasma sheath propagates away from said tip of said electrode.
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Dependencies are inferred from the claim text.