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US 2024/0186264 A1Published application
Polymer layers for adhesive promotion and stress management in glass layers in integrated circuit devices
AssigneeIntel Corporation
InventorsYi Yang, Eungnak Han, Suddhasattwa Nad, Marcel A. Wall
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Abstract
In one embodiment, an apparatus includes a glass substrate, a metal, and a polymeric layer between the metal and the glass substrate. The polymeric layer includes polymer molecules with an R1 group, an R2 group, a polymer backbone between the R1 group and R2 group, and an R3 group side-attached to the polymer backbone. The polymeric layer is bonded to the glass substrate via the R1 groups and bonded to the metal via the R2 groups.
Claims25
An apparatus comprising:
- a glass substrate;
- a metal;
- and
- a polymeric layer between the metal and the glass substrate, the polymeric layer comprising polymer molecules with an R1 group, an R2 group, a polymer backbone between the R1 group and R2 group, and an R3 group side-attached to the polymer backbone, wherein the polymeric layer is bonded to the glass substrate via the R1 groups and bonded to the metal via the R2 groups.
1 more element
An integrated circuit package substrate comprising:
- a glass core layer comprising Silicon and Oxygen;
- metal vias electrically coupling a first side of the core layer and a second side of the core layer;
- and
- a polymeric layer between the metal vias and the core layer, the polymeric layer comprising polymer molecules with an R1 group, an R2 group, a polymer backbone between the R1 group and R2 group, and an R3 group side-attached to the polymer backbone, wherein the polymeric layer is bonded to the glass substrate via the R1 groups and bonded to the metal via the R2 groups.
1 more element
A method comprising:
- depositing a polymeric film on a surface of a glass substrate, the polymeric film comprising polymer molecules with an R1 group, an R2 group, a polymer backbone between the R1 group and R2 group, and an R3 group side-attached to the polymer backbone;
- curing the polymeric film;
- and
- depositing a metal on the polymeric film.
1 more element
Dependencies are inferred from the claim text.