Passive separation cassette and carrier

A system for transporting and processing a workpiece, comprising:

• a first robot having a first end effector;
• a workpiece transfer apparatus, comprising a cassette, having an arm having a plurality of carrier support posts and a plurality of workpiece support posts that are taller than the plurality of carrier support posts;
• a carrier, adapted to hold a workpiece, wherein the carrier is larger than the workpiece, and wherein the carrier comprises holes passing therethrough corresponding to locations of each of the plurality of workpiece support posts;
• and
• a second robot having a second robot end effector, wherein the first robot and the second robot place and remove workpieces from the workpiece transfer apparatus.

A system for transporting and processing a workpiece, comprising:

• a first robot;
• a workpiece transfer apparatus, comprising a cassette, having an arm having a plurality of carrier support posts and a plurality of workpiece support posts that are taller than the plurality of carrier support posts;
• a carrier, adapted to hold a workpiece, wherein the carrier is larger than the workpiece, and wherein the carrier comprises holes passing therethrough corresponding to locations of each of the plurality of workpiece support posts;
• semiconductor processing equipment;
• and
• a second robot, wherein the first robot utilizes the carrier to transport workpieces to and from the workpiece transfer apparatus and the second robot transports workpieces to and from the semiconductor processing equipment without the carrier.