Surface treatment device and method
AssigneeASML Netherlands B.V.
InventorsMonim AZIMI, Tjarco LINDEIJER, Michel DIJKSTRA, Siegfried Alexander TROMP, Ashwin SRIDHAR
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Abstract
A surface treatment device for treating a surface of a substrate support, wherein the surface treatment device comprises a contacting surface that is configured to contact the surface of the substrate support. The contacting surface is configured with at least a first contour with a first centre of curvature and a second contour with a second centre of curvature, wherein the first centre of curvature and the second centre of curvature are non-coincident points.
Claims21
-15. (canceled)
A surface treatment device for treating a surface of a substrate support, the surface treatment device comprising:
- a contacting surface configured to contact the surface of the substrate support, the contacting surface comprising:
- a material at least as hard or harder than the material of the surface of the substrate support;
- a first circular-arc shaped contour and a second circular-arc shaped contour, the first circular-arc shaped contour is a first contour with a first centre of curvature and the second circular-arc shaped contour is a second contour with a second centre of curvature, the second contour arranged at an opposite side of the surface treatment device in respect to the first contour, wherein the first centre of curvature and the second centre of curvature are non-coincident points.
A method for reconditioning a support surface of a substrate support using a surface treatment device, comprising:
- (a) aligning a first contour of a first surface treatment device concentric with a periphery of the substrate support, the first contour comprising a first curvature is substantially similar as the curvature of the periphery;
- (b) bringing the first surface treatment device in contact with the support surface;
- (c) moving the first surface treatment device and the substrate support relative to each other while the first surface treatment device is in contact with the support surface;
- and
- (d) maintaining concentric alignment between the first contour and the periphery of the substrate support during the relative movement.
Dependencies are inferred from the claim text.