A method of manufacturing a substrate with a core for an induction device, comprising:
- providing a vacuum transport chamber with a circular inner space about an axis;
- providing along a plane perpendicular to said axis, a circular arrangement comprising a multitude of substrate carriers in said circular continuous inner space and coaxially to said axis;
- providing along a plane perpendicular to said axis, a circular arrangement of substrate treatment stations being positioned to be treatment-operative into said circular continuous inner space;
- providing a rotational drive operationally coupled between said circular arrangement of said multitude of substrate carriers and said circular arrangement of substrate treatment stations;
- providing said circular arrangement of said multitude of substrate carriers and said circular arrangement of substrate treatment stations mutually aligned;
- wherein at least one of said treatment stations is a first sputter deposition station with a single target;
- wherein at least one of said treatment stations is a second sputter deposition station with a single target;
- providing said single target of said first sputter deposition station of a first soft magnetic material;
- providing said target of said second sputter deposition station of a second soft magnetic material different from said first soft magnetic material;
- providing a control unit operationally coupled to said treating stations and to said rotational drive;
- loading substrates to said substrate carriers;
- establishing a relative rotation between said circular arrangement of said multitude of substrate carriers and said circular arrangement of said substrate treatment stations by said rotational drive;
- depositing on said substrates a first layer of said first soft magnetic material and a second layer of said second soft magnetic material;
- controlling by said control unit said at least one first sputter deposition station and said at least one second sputter deposition station to continuously sputter-deposit towards and onto said circular arrangement comprising said multitude of said substrate carriers, at least during more than one 360° revolution of said circular arrangement comprising said multitude of said substrate carriers relative to said circular arrangement of said substrate treatment stations and about said axis, said more than one 360° revolutions directly succeeding one another;
- and
- depositing during at least some of said more than one revolution, layers of said first soft magnetic material and layers of said second soft magnetic material directly one upon the other on said substrates.