Predicting device, developing device, predicting method, and non-transitory computer-readable medium
AssigneeAsahi Kasei Kabushiki Kaisha
InventorsRyosuke HASEGAWA, Tomoya YOSHINO
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AssigneeAsahi Kasei Kabushiki Kaisha
InventorsRyosuke HASEGAWA, Tomoya YOSHINO
Estimating the term…
There is provided a predicting device including: a processing condition acquisition unit which acquires a development processing condition in developing; a developing solution data acquisition unit which acquires developing solution data indicating a composition of a developing solution; a prediction unit which generates prediction data in which a composition of a developing solution after development is predicted, based on the development processing condition and the developing solution data; and an output unit which outputs information corresponding to the prediction data. The prediction unit may use the prediction data as new developing solution data, repeatedly execute generation processing of the prediction data multiple times, and generate a prediction data group including pieces of the prediction data obtained multiple times.
A predicting device comprising:
A predicting method comprising:
A non-transitory computer-readable medium having recorded thereon a predicting program that, when executed by a computer, causes the computer to function as:
Dependencies are inferred from the claim text.