Pressure transducer device with hybrid barrier structure and method for manufacturing same

A MEMS pressure transducer chip with a hybrid integrated environmental barrier structure, the MEMS pressure transducer chip comprising:

• a substrate comprising at least one membrane;
• the substrate comprising a stepped recess structure, the stepped recess structure further comprising a first recess having a first lateral width and an adjacent second recess having a second lateral width larger than the first lateral width, wherein the stepped recess structure extends between the membrane and a substrate surface opposite the membrane;
• and
• an environmental barrier structure located inside the second recess.

A MEMS pressure transducer package housing a MEMS pressure transducer chip, the MEMS pressure transducer chip comprising:

• a substrate comprising at least one membrane;
• the substrate comprising a stepped recess structure, the stepped recess structure further comprising a first recess having a first lateral width and a second recess adjacent to the first recess, the second recess having a second lateral width larger than the first lateral width, wherein the stepped recess structure extends between the membrane and a substrate surface opposite the membrane;
• and
• an environmental barrier structure located inside the second recess.